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Trichlorosilane

Trichlorosilane

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Quick Overview

Trichlorosilane, HSiCl3, is a colorless, toxic, flammable, corrosive liquid having a vapor pressure of 9.67 psia (6.7 kPa) at 70°F (21°C). It is shipped under nitrogen pressure of 20 psig (138 kPa).
SKU# trichlorosilane

Product Description

Trichlorosilane

Trichlorosilane, HSiCl3, is a colorless, toxic, flammable, corrosive liquid having a vapor pressure of 9.67 psia (6.7 kPa) at 70°F (21°C). It is shipped under nitrogen pressure of 20 psig (138 kPa).

Applications
Epitaxial deposition of silicon, especially for thicker (>5 microns) layers where an abrupt transition profile and tight process control for film thickness are not critical.

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; PVDF
Elastomers: Viton®

Molecular Weight
135.5

Specific Gravity (Air=1)
4.7

Odor
Pungent, Suffocating

CAS Registry No.
10025-78-2

Product Attachments

View FileDownload MSDS: Trichlorosilane    Size: (4 KB)