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Silicon Tetrachloride

Silicon Tetrachloride

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Quick Overview

Silicon Tetrachloride, SiCl4, is a colorless, toxic, nonflammable, corrosive liquid with a vapor pressure of 3.75 psia (26 kPa) at 70°F (21°C).
SKU# silicon-tetrachloride

Product Description

Silicon Tetrachloride

Silicon Tetrachloride, SiCl4, is a colorless, toxic, nonflammable, corrosive liquid with a vapor pressure of 3.75 psia (26 kPa) at 70°F (21°C).

Applications
Applications of epitaxial silicon; plasma etching of metals.

Materials Compatibility
Metals: Stainless Steel; Carbon Steel; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; PVDF
Elastomers: Viton®

Molecular Weight
169.90

Specific Gravity (Air=1)
5.8

Odor
Pungent, Suffocating

CAS Registry No.
10026-04-7

Product Attachments

View FileDownload MSDS: Silicon Tetrachloride    Size: (64.63 KB)