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Nitrogen Trifluoride

Nitrogen Trifluoride

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Quick Overview

Nitrogen Trifluoride, NF3, is a colorless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure.
SKU# nitrogen-trifluoride

Product Description

Nitrogen Trifluoride

Nitrogen Trifluoride, NF3, is a colorless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure.

Applications
Plasma and thermal cleaning of CVD reactors.

Materials Compatibility
Metals: Stainless Steel; Monel
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; PVDF
Elastomers: None

Molecular Weight
71.019

Specific Gravity (Air=1)
2.46

Odor
Mold-Like

CAS Registry No.
7783-54-2

For complete details, including available purity levels and cylinders, please access our product specification sheet for nitrogen trifluoride.

Product Attachments

View FileDownload Literature: Nitrogen Trifluoride    Size: (53.71 KB)
View FileDownload MSDS: Nitrogen Trifluoride    Size: (60.86 KB)