Cryo Pure

Halocarbon 23

Halocarbon 23

Double click on above image to view full picture

Zoom Out
Zoom In

More Views

Call For Price

Availability: In stock

Quick Overview

Halocarbon 23, CHF3, (trifluoromethane) is a colorless, nonflammable, liquefied, high-pressure gas shipped at its vapor pressure of 635 psig (4,380 kPa) at 70°F (21°C).
SKU# halocarbon-23

Product Description

Halocarbon 23

Halocarbon 23, CHF3, (trifluoromethane) is a colorless, nonflammable, liquefied, high-pressure gas shipped at its vapor pressure of 635 psig (4,380 kPa) at 70°F (21°C).

Applications
CHF3 is used in plasma etching, especially of SiO2 and Si3N4 where good selectivity versus underlying polysilicon can be achieved. With added oxygen, polymer formation can be controlled; additional hydrogen-containing gases improve the SiO2 -to-Si selectivity. 

Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel
Plastics: PTFE, FEP, and PFA Fluoropolymers resins; PVDF
Elastomers: Viton®; Buna-N; Neoprene

Molecular Weight
70.01

Specific Gravity (Air=1)
2.43

Odor
Slightly Ether-Like

CAS Registry No.
75-46-7

Product Attachments

View FileDownload MSDS: Halocarbon 23    Size: (59.25 KB)