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Halocarbon 14

Halocarbon 14

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Quick Overview

Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas.
SKU# halocarbon-14

Product Description

Halocarbon 14

Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas.

Applications

With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and stripping of photoresists and other polymers are also major uses of CF(usually <20%) and oxygen mixtures.

Materials Compatibility

Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Copper; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel®; PVDF
Elastomers: Viton®; Buna-N®; Neoprene; Polyurethane

Molecular Weight

88

Specific Gravity (Air=1)

3.04

Odor: 
None

CAS Registry No.

75-73-0

Product Attachments

View FileDownload MSDS: Halocarbon-14    Size: (55.83 KB)