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Halocarbon 116

Halocarbon 116

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Quick Overview

Halocarbon 116, C2F6, (hexafluoroethane) is a colorless, nonflammable gas shipped as a nonliquefied gas at its vapor pressure of 430 psig (2,965 kPa) at 70°F (21°C).
SKU# halocarbon-116

Product Description

Halocarbon 116

Halocarbon 116, C2F6, (hexafluoroethane) is a colorless, nonflammable gas shipped as a nonliquefied gas at its vapor pressure of 430 psig (2,965 kPa) at 70°F (21°C).

Applications
 
A particularly versatile etchant for many substrates, Halocarbon 116 can be used for selectively etching polysilicon versus SiO2 . Metal silicides and oxides are selectively etched versus their metal substrates, and photoresist stripping has been accomplished with added O2 . With its low F-to-C ratio, C2F6 is also used for selective etching of SiO2 over silicon.

Materials Compatibility

Metals: Brass; Stainless Steel; Carbon Steel; Aluminum; Zinc; Copper; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel®; PVDF
Elastomers: Viton®; Buna-N®; Neoprene; Polyurethane

Molecular Weight

138.01

Specific Gravity (Air=1)

4.8

Odor
Slightly Ether-Like

CAS Registry No.

76-16-4

Product Attachments

View FileDownload MSDS: Halocarbon 116    Size: (57.93 KB)