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Dichlorosilane

Dichlorosilane

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Quick Overview

Dichlorosilane, SiH2Cl2, is a colorless, toxic, flammable, corrosive liquid shipped at its vapor pressure of 9.1 psig (63 kPa) at 70°F (21°C).
SKU# dichlorosilane

Product Description

Dichlorosilane

Dichlorosilane, SiH2Cl2, is a colorless, toxic, flammable, corrosive liquid shipped at its vapor pressure of 9.1 psig (63 kPa) at 70°F (21°C).

Applications

Growth of epitaxial and polycrystalline silicon; chemical vapor deposition of silicon dioxide and nitride, and tungsten silicide. Higher purities of dichlorosilane can be especially useful for high-purity depositions such as epi for CMOS, which requires very low carbon and metallic impurities.

Materials Compatibility

Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel
Plastics: Kel-F®; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel®; Kalrez®; PVDF
Elastomers: Viton®

Molecular Weight

101.01

Specific Gravity (Air=1)

3.52

Odor
Pungent, Suffocating

CAS Registry No.

4109-96-0