Cryo Pure

Bulk Ammonia Gas Delivery System

Bulk Ammonia Gas Delivery System

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Quick Overview

Ammonia is used in gallium nitride (GaN) manufacturing processes for the production of high brightness blue and white LEDs (light emitting diodes) and optoelectronic devices. Ammonia is also used in the chemical vapor deposition of silicon nitride films.
SKU# ammonia

Product Description

Bulk Ammonia Gas Delivery System

Praxair® is revolutionizing flow rates for ammonia as well as many other specialty gases. Our patented system significantly reduces the number of cylinder changes required by conventional systems —leading to improvements in uptime, production costs, more consistent purity, and most importantly, safety. The proprietary Praxair enclosed heating system allows higher flow rates while maintaining controlled external tonner temperatures. The system can be skid mounted to facilitate installation and movement around the facility. It delivers continuous ammonia flows of 600 slpm with peaks greater than 900 slpm.

Heating System

  • Infrared temperature monitoring of tonner surface
  • Automatic shutoff with dual set points
  • Safety critical alarms shut offflow
  • Fully insulated tonner enclosure
  • Weather resistant enclosure
  • Enclosure designed for easy tonner change-outs

Designed for High Purity

  • Components and piping are electropolished 316LStainless Steelwith an internal finish of less than10 Ra Max
  • Low dead spacecomponents and tubing branches
  • Pressure transducers with low dead space
  • Minimized wetted surface area of components
  • Springless, packless diaphragm valves
  • All welds are high-purity orbital welds
  • All manual connections are VCR type
  • Leak tight and tested to 1 x 10-9 scc/sec He

Reliable, Easy-to-Use and Safe Operation

  • Self contained purge system
  • Fail safe air-to-open valves
  • Data acquisition or remote monitoring PC interface on controller
  • Restrictive flow orifices
  • Redundant supply trains
  • Auto switchover based onweight or pressure 
  • Bypass valving allows cross-utilization of gas and components
  • Train isolation allows serviceon one train while the other remains in service
  • Excess flow switch
  • Ventilated enclosures — air intake filters and diffuser for continuous, positive ventilation


  • Component burn-in prior to shipment
  • Liquid crystal display TFT touchscreen 
  • Full graphical interface
  • Emergency shutoff button onfront
  • All valve actuations are verified
  • Critical alarms close all valves
  • AC/DC power failure detection
  • Twisted wire pair RS-485
  • Optional fiber optic RS-485
  • Digital I/O optically isolated to prevent solenoid EM field from disrupting microprocessor
  • Menu driven operation

Product Attachments

View FileDownload Literature: Ammonia    Size: (504.8 KB)
View FileDownload MSDS: Ammonia    Size: (144.26 KB)